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Study on Sensitivity Enhancement of Circular Shaped MEMS Cantilevers Using COMSOL Multiphysics

K. Durga Aparna, Rajesh Kanuganti


Arrival of Micro-Electro Mechanical System (MEMS) in the last decade has been immense and ever growing. MEMS are an expanding and fast growing technology with an extensive range of applications. Micro cantilevers belong to MEMS set of devices and are often used for detection of forces in Micromechanical Sensors. The mass loading of bio-molecules on rectangular micro cantilever beam surface gives small deflection at its free end and poor sensitivity corresponding to the lower concentration of analyte. This paper gives the relative study of a single and double leg circular shaped cantilever based mass sensor in micrograms range. The principle of the paper is to propose a most suitable geometry of circular shaped cantilevers which will have a better sensitivity when compared to rectangular cantilever operating in static mode using COMSOL Multiphysics software.


MEMS, Micro Cantilever, Principles, Shapes, Sensitivity, Deflection, Analyte, Static, COMSOL.

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Hans Peter Lang, Martin Hegner, Christoph Gerber, “Cantilever Array sensors”, Materials Today, Volume8, Issue 4, April 2005, PP 30-36.

Monika Chaudary, and Amrita Gupta, “Microcantielever based sensors”, Defence science Journal, Vol.59, NO.6, November 2009, PP-634-641.

S.Sunithamani, N. Vidhupriya, K. Sai Srilekha, K. Uday Kumar ,”Study of piezoelectric cantilever based Energy harvester for IOT Applications” IJITEE, ISSN: 2278-3075, Volume8,Issue 7, May 2019.

“Design and Analysis of MEMS Based Micro-Cantilever Shapes for Sensitivity Improvement” IJMETMR, ISSN NO: 2348-4845, Volume 3(2016), Issue 4 April 2016.

Suryansh Arora, Sumati, Arti Arora, P.J.George,”Design Of Mems Based Microcantilever Using Comsol Multiphysics”, International Journal of Applied Engineering Research, ISSN 0973-4562 Vol.7 No.11 (2012).

J. Gayathri, B.Rajesh Kumar, V. Jyothi, “Analysis of Mass Based Micro Cantilever Using Comsol”, International Journal of Emerging Technology and Advanced Engineering Website: (ISSN 2250-2459, ISO 9001:2008 Certified Journal, Volume 5, Issue 5, May 2015) .

J Reddy, V. Mounika, and GV Sunil Kumar, “Design and Analysis of Microcantilevers with Various Shapes Using COMSOL Multiphysics Software,” IJETAE Trans. vol. 3, issue 3, pp. 294-299, March 2013.

Rama Krishna Prasad, Nalluri siddaiah,” Design and model analysis of circular cantilever sensor for early detection of Parkinson’s disease”, Journal of Advanced Research in Dynamical and Control Systems • January 2017.

Gabriel M. Rebeiz, “RF MEMS – Theory, Design and Technology”, John Wiley & Sons, 2003.


Ram Datar, Seonghwan Kim, Sangmin Jeon, Peter Hesketh, Scott Manalis, Anja Boisen, and Thomas Thundat,” Cantilever Sensors:Nanomechanical Tools for Diagnostics”, MRS BULLETIN • VOLUME 34 • JUNE 2009 •

Nalluri Siddaiah, Rama Krishna Prasad, Asrita, Hanumanthulu, Anvita, Chandrasekhar,” Design and Model Analysis of Various Shape Cantilever Based Sensors for Biomolecules Detection”, Journal of Advanced Research in Dynamical and Control Systems Vol. 9. Sp– 16 / 2017.

N.Siddaiah, Manju,Aditya,D.V.Koti reddy,” Design simulation and Analysis of u shape and rectangle mems based triple coupled cantilevers”,Journal of scientific and Industrial research, Vol 76, 2017,pp 235-238. php#.VPVmCnyUevE “Moment of Inertia”

Abhijeet V. Kshirsagar, P. Duttagupta, A. Gangal.” Design of MEMS Cantilever - Hand Calculation” Sensors & Transducers Journal, Vol. 91, Issue 4, April 2008, pp. 55-69


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