Features of MEMS

Abstract

MEMS - Micro electro mechanical systems. It refers to machines with moving components smaller than a human hair that contain each electrical and mechanical parts. MEMS. Additionally referred to as Microsystems, microstructures, microstructure technology (MST) and mechatronics. Micro electro mechanical Systems (MEMS) have gained acceptance as viable merchandise for several commercial and government applications. This paper offers a Short review of history and components of MEMS. This paper also discusses current and future MEMS applications. It then gives the fabrication processes of MEMS. Additional this paper discusses regarding the MEMS achievements, challenges and needs. Next it discusses the long run type of MEMS. Lastly it
concludes location that MEMS have enough potential to ascertain a second technological revolution of shrinking which will produce associate degree business that exceeds the IC business in each size and impact on society.