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Development and Implementation of Mems Based 2d Accelerometer Using Poly Silicon
Abstract
Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMSspecific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms can be used to convert realworld signals from one form of energy to another, thereby enabling many different microsensors, microactuators and microsystems. A 2D model of a MEMS based accelerometer is derived. High sensitivity and low noise floor is a prerequisite to micro-g vibration measurement. The effects of environmental sensitivities, such as base strain, thermal transients, and caustic noise may be significant. Attention should be paid, when measuring low-g acceleration using DC response accelerometers, to the direction of earth’s gravity.
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Design and application guide - ENDEVCO® CORPORATION, CALIFORNIA, USA
A Beginner’s guide for accelerometer – dimension engineering
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